4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Liquid phase etching

Richard O. Henry

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Manufacturable CoWP metal cap process for copper interconnects

Compositions – Electrically conductive or emissive compositions – Metal compound containing
Reexamination Certificate

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Manufacturable CoWP metal cap process for copper interconnects

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method of forming field effect transistors using diluted...

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
Reexamination Certificate

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Semiconductor fabrication process including an SiGe rework...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2305642

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