Semiconductor device manufacturing: process
Coating of substrate containing semiconductor region or of...
Insulative material deposited upon semiconductive substrate
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Aluminum oxide low pressure chemical vapor deposition (LPCVD) sy
Aluminum oxide LPCVD system
Apparatus for chemical vapor deposition of aluminum oxide
Bilayer cap structure including HDP/bHDP films for...
Borophosphosilicate glass incorporated with fluorine for low the
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