4. Single-crystal, oriented-crystal, and epitaxy growth processes;
  5. Forming from vapor or gaseous state
  6. With decomposition of a precursor

Reinhard Schauer

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Coated semiconductor wafer, and process and apparatus for...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material
Reexamination Certificate

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Coated semiconductor wafer, and process and device for...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Epitaxially coated semiconductor wafer and device and method...

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Fluid growth from gaseous state combined with subsequent...
Reexamination Certificate

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Epitaxially coated semiconductor wafers having low-oxygen zone o

Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state – With decomposition of a precursor
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Epitaxially coated silicon wafer and method for producing...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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