Active solid-state devices (e.g., transistors, solid-state diode
Combined with electrical contact or lead
Of specified material other than unalloyed aluminum
Inventor
active
Method for adjusting the density of lines and contact openings a
Method for fabricating reliable metallization with Ta-Si-N barri
Multilevel metallization structure for integrated circuit I/O li
Reliable metallization with barrier for semiconductors
Sidewall structure for metal interconnect and method of...
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