Boots – shoes – and leggings
Patent
1997-09-08
2000-08-29
Teska, Kevin J.
Boots, shoes, and leggings
364489, 364490, 364491, G06F 1700, G06F 1750
Patent
active
061097756
ABSTRACT:
Disclosed is the formation of additional lines, either dummy lines or active lines, in an electrically conductive pattern of lines to provide more uniform loading for either etching or chemical/mechanical polishing of a layer of electrically conductive material from which the pattern of lines is formed. Also disclosed is the use of additional or dummy vias to balance the loading during etching of the vias, as well as to provide stress relief for underlying metal in regions or areas having a low density of vias. Further disclosed is the use of a working grid on the integrated circuit structure to analyze the spacing of lines or vias for the above effects.
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Chao Keith
Choudhury Ratan K.
Das Gauri C.
Eib Nicholas K.
Kapoor Ashok K.
LSI Logic Corporation
Siek Vuthe
Teska Kevin J.
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