4. Etching a substrate: processes
  5. Gas phase and nongaseous phase etching on the same substrate

Randhir Thakur

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Apparatus for stabilizing high pressure oxidation of a...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
Reexamination Certificate

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Apparatus for stabilizing high pressure oxidation of a...

Semiconductor device manufacturing: process – Miscellaneous
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Diffusion-enhanced crystallization of amorphous materials to imp

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Amorphous semiconductor
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Diffusion-enhanced crystallization of amorphous materials to...

Semiconductor device manufacturing: process – Making passive device – Stacked capacitor
Reexamination Certificate

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Diffusion-enhanced crystallization of amorphous materials to...

Semiconductor device manufacturing: process – Making passive device – Stacked capacitor
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