4. Coating processes
  5. Electrical product produced
  6. Integrated circuit, printed circuit, or circuit board

Randall L. Kubena

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Cloverleaf microgyroscope with through-wafer interconnects...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
Reexamination Certificate

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Dual-wafer tunneling gyroscope and an assembly for making same

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
Reexamination Certificate

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Integrated all-Si capacitive microgyro with vertical...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
Reexamination Certificate

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Integrated quartz oscillator on an active electronic substrate

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate

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Low frequency quartz based MEMS resonators and method of...

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate

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Profile ID: LFUS-PAI-P-118011

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