Integrated quartz oscillator on an active electronic substrate

Details Integrated quartz oscillator on an active electronic substrate Integrated quartz oscillator on an active electronic substrate

2007-07-27

2010-11-09

Dougherty, Thomas M (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S348000, C310S365000

Reexamination Certificate

active

07830074

ABSTRACT:
An oscillator having a quartz resonator, and a base wafer containing active electronics, wherein the quartz resonator is bonded directly to the base wafer and subsequently hermetically capped.

REFERENCES:
patent: 2487165 (1949-11-01), Miller
patent: 3390287 (1968-06-01), Sonderegger
patent: 3766616 (1973-10-01), Staudte
patent: 4364016 (1982-12-01), Tanski
patent: 4442574 (1984-04-01), Wanuga et al.
patent: 5260596 (1993-11-01), Dunn et al.
patent: 5530408 (1996-06-01), Vig et al.
patent: 5605490 (1997-02-01), Laffey et al.
patent: 5666706 (1997-09-01), Tomita et al.
patent: 6114801 (2000-09-01), Tanaka
patent: 6750728 (2004-06-01), Takahashi
patent: 7057331 (2006-06-01), Shimodaira et al.
patent: 7232700 (2007-06-01), Kubena
patent: 7237315 (2007-07-01), Kubena et al.
patent: 7459099 (2008-12-01), Kubena et al.
patent: 7557493 (2009-07-01), Fujimoto
patent: 7564177 (2009-07-01), Yoshimatsu et al.
patent: 7579748 (2009-08-01), Kuroda
patent: 2006/0022556 (2006-02-01), Bail et al.
patent: 2006/0055479 (2006-03-01), Okazaki et al.
patent: 2006/0197619 (2006-09-01), Oishi et al.
patent: 2009/0146527 (2009-06-01), Lee et al.
patent: 0 531 985 (1993-03-01), None
patent: 57-091017 (1982-06-01), None
patent: 04322507 (1992-11-01), None
patent: 08330878 (1996-12-01), None
patent: 2003-318685 (2003-11-01), None
patent: 2006-352487 (2006-12-01), None
patent: WO-84-00082 (1984-01-01), None
Abe,T., et al., “One-Chip Multichannel Quartz crystal microbalance (QCM) Fabricated by Deep RIE,” Sensors and Actuators, 2000, pp. 139-143.
Aaltonen, T., et al., “ALD of Rhodium thin films from Rh(acac)3and Oxygen,” Electrochemical and Solid-State Lett. 8, C99 (2005).
Cleland, A.N., et al., “Fabrication of High Frequency Nanometer Scale Mechanical Resonators From Bulk Si Crystals, ”applied Physics Letters, Oct. 28, 1996.
Evoy, S., et al., “Temperature-dependent Internal Friction in Silicon Nanoelectromechanical Systems,” Applied Physics Letters, vol. 77, No. 15.
Greer, J.A., et al., “Properties of SAW resonators fabricated on quartz substrates of various qualities,” Ultrasonics Symposium, 1994 IEEE, vol. 1, Nov. 1-4, 1994, pp. 31-36.
Lin, J.W, et al., “A Robust High-Q Micromachined RF Inductor for RFIC Applications,” IEEE Transactions on Electronic Devices, vol. 52, No. 7, pp. 1489-1496 (Jul. 2005).
Park, K.J., et al., “Selective area atomic layer deposition of rhodium and effective work function characterization in capacitor structures,” Applied Physics Letters 89, 043111 (2006).

Affiliated with

Also associated with

Rating

Integrated quartz oscillator on an active electronic substrate does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Integrated quartz oscillator on an active electronic substrate, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Integrated quartz oscillator on an active electronic substrate will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4196528