Semiconductor device manufacturing: process
Formation of electrically isolated lateral semiconductive...
Grooved and refilled with deposited dielectric material
Inventor
active
Creation of dielectrically insulating soi-technlogical...
Monitoring the reduction in thickness as material is removed...
Passivation of deep isolating separating trenches with sunk...
Production of a carrier wafer contact in trench insulated...
Soi vertical bipolar power component
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Profile ID: LFUS-PAI-P-2217901