4. Coating processes
  5. Coating by vapor, gas, or smoke

Qingguo Wu

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High compressive stress carbon liners for MOS devices

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Method for improving mechanical properties of low dielectric...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Method for making high stress boron-doped carbon films

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Method for producing low-K CDO films

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated...
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Method of porogen removal from porous low-k films using UV...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Total dielectric isolation
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Profile ID: LFUS-PAI-P-2253533

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