4. Data processing: generic control systems or specific application
  5. Specific application, apparatus or process
  6. Article handling

Pradeep Pandey

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Adaptive real time control of a reticle/mask system

Automatic temperature and humidity regulation – Combined draft and check control
Reexamination Certificate

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Batch type heat treatment system, method for controlling...

Electric heating – Heating devices – With power supply and voltage or current regulation or...
Reexamination Certificate

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Batch-type heat treatment apparatus and control method for...

Electric heating – Heating devices – With power supply and voltage or current regulation or...
Reexamination Certificate

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Built-in self test for a thermal processing system

Error detection/correction and fault detection/recovery – Pulse or data error handling – Digital logic testing
Reexamination Certificate

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Built-in self test for a thermal processing system

Data processing: measuring – calibrating – or testing – Measurement system – Performance or efficiency evaluation
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Profile ID: LFUS-PAI-P-952145

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