4. Optics: measuring and testing
  5. For light transmission or absorption
  6. Of fluent material

Pivotal Systems Corporation

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End point detection method for plasma etching of...

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Electrical characteristic sensed
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Method and apparatus for identifying the chemical...

Optics: measuring and testing – For light transmission or absorption – Of fluent material
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Method and apparatus for in situ testing of gas flow...

Measuring and testing – Instrument proving or calibrating – Volume of flow – speed of flow – volume rate of flow – or mass...
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System and method for controlling process end-point...

Multiplex communications – Pathfinding or routing – Switching a message which includes an address header
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