Method and apparatus for in situ testing of gas flow...

Measuring and testing – Instrument proving or calibrating – Volume of flow – speed of flow – volume rate of flow – or mass...

Reexamination Certificate

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Reexamination Certificate

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07823436

ABSTRACT:
Methods and apparatus utilize a rate of drop in pressure upstream of a gas flow controller (GFC) to accurately measure a rate of flow through the GFC. Measurement of the gas flow through the many gas flow controllers in production use today is enabled, without requiring any special or sophisticated pressure regulators or other special components. Various provisions ensure that none of the changes in pressure that occur during or after the measurement perturb the constant flow of gas through the GFC under test.

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International Search Report for PCT Application No. PCT/US2009/31170 dated Mar. 23, 2009.

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