Multiplex communications – Pathfinding or routing – Switching a message which includes an address header
Reexamination Certificate
2011-01-18
2011-01-18
Vu, Thong H (Department: 2465)
Multiplex communications
Pathfinding or routing
Switching a message which includes an address header
C156S345240
Reexamination Certificate
active
07873052
ABSTRACT:
Embodiments in accordance with the present invention allow a second end-point determination (EPD) system to actively control the end-pointing of a semiconductor process chamber, by leveraging a legacy EPD system that is already integrated with the chamber. In one embodiment, the second EPD system controls a shutter that regulates the amount of light transmitted between a plasma light source and an optical emission spectroscopy (OES) sensor of the legacy OES EPD system. In this embodiment, the legacy OES EPD system is pre-configured to call end-point when an artificial end-point condition occurs, i.e. the intensity of light falls below a pre-set threshold. When the second EPD system determines an actual end-point condition has been reached, it closes the shutter which, causes the light intensity being read by the OES sensor to fall below the pre-set threshold. This in turn triggers an end-point command to the chamber from the legacy OES EPD system.
REFERENCES:
patent: 5587931 (1996-12-01), Jones et al.
patent: 6161055 (2000-12-01), Pryor
patent: 6468222 (2002-10-01), Mault et al.
patent: 6587704 (2003-07-01), Fine et al.
patent: 6663469 (2003-12-01), Kimura et al.
patent: 6709312 (2004-03-01), Mautz
patent: 7075094 (2006-07-01), Feldbaum et al.
patent: 7591923 (2009-09-01), Mitrovic et al.
Chung Sherk
Lozic Tomislav
Monkowski Joseph Raymond
Wong Geoffrey Rodney
Pivotal Systems Corporation
Townsend & Townsend & Crew LLP
Vu Thong H
LandOfFree
System and method for controlling process end-point... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with System and method for controlling process end-point..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and System and method for controlling process end-point... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2693248