4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with coating step

Phi L. Nguyen

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Etch process to produce rounded top corners for sub-micron silic

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Highly selective etch process for submicron contacts

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Patent

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Interconnect structures containing conductive electrolessly...

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified configuration
Reexamination Certificate

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Method of controlling etch bias with a fixed lithography pattern

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Patent

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Method of via patterning utilizing hard mask and stripping...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1053060

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