4. Semiconductor device manufacturing: process
  5. Making field effect device having pair of active regions...
  6. Having insulated gate

Peter I. Porshnev

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Plasma immersion ion implantation process with chamber...

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – On insulating substrate or layer
Reexamination Certificate

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Plasma immersion ion implantation process with chamber...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Plasma
Reexamination Certificate

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Reducing photoresist layer degradation in plasma immersion...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Semiconductor device fabrication chamber cleaning method and...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2158466

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