4. Cleaning and liquid contact with solids
  5. Processes
  6. Including application of electrical radiant or wave energy...

Peter Huebler

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Metal line having an increased resistance to...

Active solid-state devices (e.g. – transistors – solid-state diode – Physical configuration of semiconductor – With specified crystal plane or axis
Reexamination Certificate

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Method for cleaning the surface of a substrate

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Reexamination Certificate

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Method of patterning a low-k dielectric using a hard mask

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Technique for forming embedded metal lines having increased...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2965705

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