4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Pao-Hwa Chou

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Film formation apparatus and method for semiconductor process

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of...
Reexamination Certificate

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Film formation apparatus and method for semiconductor process

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Film formation method and apparatus for forming...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
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Film formation method and apparatus for semiconductor process

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
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Film formation method and apparatus for semiconductor process

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2217597

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