4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

NuFlare Technology, Inc.

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Apparatus and method for charged-particle beam writing

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Apparatus and method for pattern inspection

Optics: measuring and testing – Inspection of flaws or impurities
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Beam dose computing method and writing method and record...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making
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Charged particle beam apparatus and charged particle beam...

Radiant energy – With charged particle beam deflection or focussing – With detector
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Charged particle beam apparatus, abnormality detecting...

Coded data generation or conversion – Converter calibration or testing
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