Charged particle beam apparatus, abnormality detecting...

Details Charged particle beam apparatus, abnormality detecting... Charged particle beam apparatus, abnormality detecting...

2007-03-28

2008-12-09

Young, Brian (Department: 2819)

Coded data generation or conversion

Converter calibration or testing

C341S144000

Reexamination Certificate

active

07463173

ABSTRACT:
A charged particle beam apparatus includes a plurality of digital-analog (DA) converter units configured to input digital signals, convert the digital signals into analog values, and amplify the analog values to output the analog values, a deflector configured to input at least one analog value of the plurality of analog values output from the plurality of DA converter units to deflect a charged particle beam, and a judging unit configured to judge that at least one of the plurality of DA converter units is abnormal by using the plurality of analog values output from the plurality of DA converter units.

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patent: 5134300 (1992-07-01), Kai et al.
patent: 5614725 (1997-03-01), Oae et al.
patent: 7209055 (2007-04-01), Stovall et al.
patent: 2004-259812 (2004-09-01), None
patent: 2005-129614 (2005-05-01), None

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