Conveyors: power-driven – With means to facilitate working – treating – or inspecting... – Condition responsive control of conveyor or station apparatus
Patent
1998-07-20
2000-04-18
Valenza, Jospeh E.
Conveyors: power-driven
With means to facilitate working, treating, or inspecting...
Condition responsive control of conveyor or station apparatus
1984644, 1984686, 41422202, 414937, 474102, B65G 4300
Patent
active
060503890
ABSTRACT:
A carrier apparatus is provided with a first carrier mechanism, a second carrier mechanism, and a sensor. The first carrier mechanism has a holding portion holding a substrate, a driving pulley, an idler pulley, and a first endless belt, the first endless belt being provided between the driving pulley and the idler pulley and the holding portion being attached to the first endless belt. The second carrier mechanism has a driving source with a rotation output shaft, a speed reducing pulley fixed on the driving pulley and more than one second endless belts, the above more than one second endless belts being provided between the rotation output shaft and the speed reducing pulley. A sensor detects the state of the second endless belt, for example, the occurrence of cutting. As a result, even if the state of a carrier belt deteriorates, the holding portion is prevented from falling.
REFERENCES:
patent: 3956632 (1976-05-01), Hall et al.
patent: 3963115 (1976-06-01), Teske et al.
patent: 4462523 (1984-07-01), Kerr
patent: 4657131 (1987-04-01), Brychta et al.
patent: 5096044 (1992-03-01), Biebel
patent: 5664254 (1997-09-01), Ohkura et al.
Iida Naruaki
Kozawa Seiji
Tokyo Electron Limited
Valenza Jospeh E.
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