4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Motohiro Kaneko

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Apparatus for chemical vapor deposition

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Apparatus for chemical vapor deposition

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Vacuum processing apparatus

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Vacuum processing method and apparatus

Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent

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Profile ID: LFUS-PAI-P-840542

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