4. Coating apparatus
  5. Gas or vapor deposition

Mitsubishi Materials Polycrystalline Silicon Corporation

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Evaluation method for polycrystalline silicon

Chemistry: analytical and immunological testing – Process or composition for determination of physical state... – Of crystal or crystalline material
Reexamination Certificate

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Method and apparatus for feeding a gas for epitaxial growth

Coating apparatus – Gas or vapor deposition
Patent

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Method and apparatus for feeding a gas for epitaxial growth

Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state – With decomposition of a precursor
Patent

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Polycrystalline silicon rod and method of processing the same

Stock material or miscellaneous articles – Coated or structually defined flake – particle – cell – strand,... – Rod – strand – filament or fiber
Reexamination Certificate

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Process for producing hexachlorodisilane

Chemistry of inorganic compounds – Silicon or compound thereof – Halogen containing
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