Evaluation method for polycrystalline silicon

Details Evaluation method for polycrystalline silicon Evaluation method for polycrystalline silicon

2005-07-12

2005-07-12

Alexander, Lyle A. (Department: 1743)

Chemistry: analytical and immunological testing

Process or composition for determination of physical state...

Of crystal or crystalline material

C436S005000, C438S014000, C117S002000

Reexamination Certificate

active

06916657

ABSTRACT:
An evaluation method for polycrystalline silicon including the steps of immersing the polycrystalline silicon in an agent which is capable of dissolving the polycrystalline silicon, and counting the number of foreign particles in the agent. The polycrystalline silicon thus evaluated may be used as a material for pulling single crystal silicon. The evaluation method may further include a step of analyzing the composition of the foreign particles. In yet another aspect, the evaluation method may further include a step of subjecting the agent to a circulation filtering process prior to the immersion of the polycrystalline silicon in the agent.

REFERENCES:
patent: 4213937 (1980-07-01), Padovani et al.
patent: 5793833 (1998-08-01), Imai
patent: 6066872 (2000-05-01), Okada et al.
patent: 6172376 (2001-01-01), Xu et al.
patent: 6429035 (2002-08-01), Nakagawa et al.
patent: 6534353 (2003-03-01), Kuramasu et al.
patent: 0390671 (1990-10-01), None
patent: 5-319990 (1993-12-01), None
patent: 6-283498 (1994-10-01), None
patent: 8-48512 (1996-02-01), None
patent: 11-145230 (1999-05-01), None
patent: 11-171685 (1999-06-01), None
patent: 2000-128692 (2000-05-01), None
Chen et al., “Simultaneous Determation of Fe, Al, Ca, B, As and P in Industrial Silicon or Multi-crystal Silicon by ICP-AES,” Yunnan Metallurgy, Jul., 1998, abstract only.

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