4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Michael Santiago Cox

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In situ application of etch back for improved deposition...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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In situ application of etch back for improved deposition...

Semiconductor device manufacturing: process – Chemical etching
Reexamination Certificate

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Plasma assisted semiconductor substrate processing chamber...

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Semiconductor device fabrication chamber cleaning method and...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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