4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Michael Rattner

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Method of etching a deep trench having a tapered profile in...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method of plasma etching a deeply recessed feature in a...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method of smoothing a trench sidewall after a deep trench...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Silicon-containing structure with deep etched features, and...

Etching a substrate: processes – Etching of semiconductor material to produce an article...
Reexamination Certificate

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