4. Coating processes
  5. Electrical product produced
  6. Integrated circuit, printed circuit, or circuit board

Michael A. Fury

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Automated dense phase fluid cleaning system

Cleaning and liquid contact with solids – Apparatus – Automatic controls
Reexamination Certificate

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Load lock system for supercritical fluid cleaning

Cleaning and liquid contact with solids – Processes – Including use of vacuum – suction – or inert atmosphere
Reexamination Certificate

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Method of and apparatus for substrate pre-treatment

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method of making barrier layers

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation
Reexamination Certificate

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Method of making electronic materials

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of...
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Profile ID: LFUS-PAI-P-439198

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