Automated dense phase fluid cleaning system

Details Automated dense phase fluid cleaning system Automated dense phase fluid cleaning system

2005-02-22

2005-02-22

Kornakov, M. (Department: 1746)

Cleaning and liquid contact with solids

Apparatus

Automatic controls

C134S105000, C134S107000, C134S108000, C134S184000, C134S195000, C134S902000

Reexamination Certificate

active

06857437

ABSTRACT:
Initially, process parameters for dense phase fluid cleaning are determined. Thereafter, a cleaning chamber containing a substrate is pressurized with a dense phase fluid, based on these process parameters. The substrate is then cleaned with the dense phase fluid, again based on these process parameters. Exhaust fluid is subsequently expelled from the cleaning chamber, and thereafter analyzed. The process parameters are then adjusted to adjusted process parameters based on the analysis of the exhaust fluid. Thereafter, the cleaning chamber is again pressurized and cleaning repeated. This pressurization and cleaning is based on the adjusted process parameters. Also, this pressurization and cleaning is repeated until the substrate is sufficiently clean.

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patent: 20040065353 (2004-04-01), Tunnicliffe et al.

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