4. Semiconductor device manufacturing: process
  5. Chemical etching

Mehran Sedigh

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In situ hard mask approach for self-aligned contact etch

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Increasing self-aligned contact areas in integrated circuits...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Increasing self-aligned contact areas in integrated circuits...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Method of 193 NM photoresist stabilization by the use of ion...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
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Shallow trench isolation structures and methods for forming...

Semiconductor device manufacturing: process – Chemical etching
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Profile ID: LFUS-PAI-P-2313816

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