Active solid-state devices (e.g., transistors, solid-state diode
With means to control surface effects
Insulating coating
Inventor
active
Adhesion between dielectric layers in an integrated circuit
Highly-planar interlayer dielectric thin films in integrated cir
Method of planarizing a semiconductor device by depositing a die
Planarization structure and method for dielectric layers
Process for depositing a stratified dielectric structure for enh
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