4. Optics: measuring and testing
  5. Of light reflection

Maurits Van Der Schaar

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Alignment system for lithographic apparatus for measuring a...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Alignment tool for a lithographic apparatus

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate

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Computer program for determining a corrected position of a...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Device inspection method and apparatus using an asymmetric...

Radiant energy – Photocells; circuits and apparatus – With circuit for evaluating a web – strand – strip – or sheet
Reexamination Certificate

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Device manufacturing method and computer program product

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Profile ID: LFUS-PAI-P-2241521

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