Radiant energy – Photocells; circuits and apparatus – With circuit for evaluating a web – strand – strip – or sheet
Reexamination Certificate
2006-09-26
2006-09-26
Le, Que T. (Department: 2878)
Radiant energy
Photocells; circuits and apparatus
With circuit for evaluating a web, strand, strip, or sheet
C250S548000
Reexamination Certificate
active
07112813
ABSTRACT:
A method of device inspection, the method comprising providing an asymmetric marker on a device to be inspected, the form of asymmetry of the marker being dependent upon the parameter to be inspected, directing light at the marker, obtaining a first measurement of the position of the marker via detection of diffracted light of a particular wavelength or diffraction angle, obtaining a second measurement of the position of the marker via detection of diffracted light of a different wavelength or diffraction angle, and comparing the first and second measured positions to determine a shift indicative of the degree of asymmetry of the marker.
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Markle, D. A., “Submicron 1:1 Optical Lithography”, Semi-conductor International, pp. 173-142, May 1986.
Bornebroek Frank
Cramer Hugo Augustinus Joseph
De Jager Pieter Willem Herman
Den Boef Arie Jeffrey
Dusa Mircea
ASML Netherlands B.V.
Le Que T.
Pillsbury Winthrop Shaw & Pittman LLP
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