4. Semiconductor device manufacturing: process
  5. Coating of substrate containing semiconductor region or of...

Matthias Ilg

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Advanced damascene planar stack capacitor fabrication method

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Patent

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Advanced damascene planar stack capacitor fabrication method

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Patent

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Deposition of carbon into nitride layer for improved selectivity

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Dishing resistance

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Dual work function CMOS device

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Profile ID: LFUS-PAI-P-189555

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