4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Masayuki Tomoyasu

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Etching method

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
Reexamination Certificate

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Ion implantation system

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Laser beam scanning system

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Method and system for performing a chemical oxide removal...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Observation window of plasma processing apparatus and plasma...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With measuring – sensing – detection or process control means
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Profile ID: LFUS-PAI-P-78317

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