Laser beam scanning system

Details Laser beam scanning system Laser beam scanning system

1989-02-27

1991-11-26

LaRoche, Eugene R.

Optical: systems and elements

Optical modulator

Light wave temporal modulation

324158R, 359305, 359245, G02F 111, G02F 133, G01R 100

Patent

active

050677985

ABSTRACT:
A laser beam scanning system is used as a laser probing apparatus. The apparatus includes an acousto-optic modulator provided on an optical path for intensity-modulating a laser beam in accordance with an input signal, a beam intensity control device for measuring a beam intensity distribution of the laser beam incident on a wafer surface, for correcting the input signal to the modulator as a result of measurement, and for making uniform the laser beam illumination distribution over the wafer surface, and a device for measuring an electrical variation in that wafer pattern portion illuminated with the laser beam.

REFERENCES:
patent: 4367926 (1983-01-01), Hohki
patent: 4541712 (1985-09-01), Whitney
patent: 4733176 (1988-03-01), Feuerbaum
patent: 4906922 (1990-03-01), Takahashi et al.

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