4. Electric lamp and discharge devices: systems
  5. Discharge device load with fluent material supply to the...
  6. Plasma generating

Masahiro Sumiya

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Plasma processing apparatus

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With measuring – sensing – detection or process control means
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Plasma processing apparatus and method using active matching

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Plasma processing apparatus and method with controlled...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Plasma processing apparatus having high frequency power...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – Having glow discharge electrode gas energizing means
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Plasma processing apparatus using active matching

Coating apparatus – Gas or vapor deposition – With treating means
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Profile ID: LFUS-PAI-P-1859929

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