Chemistry: electrical and wave energy
Apparatus
Coating, forming or etching by sputtering
Inventor
active
Blocking shield and method for contouring the thickness of sputt
Clamp with wafer release for semiconductor wafer processing equi
Clamp with wafer release for semiconductor wafer processing equi
Gate valve for wafer processing system
Magnetron sputter device using the same pole piece for coupling
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Profile ID: LFUS-PAI-P-247363