4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Application of energy to the gaseous etchant or to the...

Markus Winterhalter

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Generating an output DC voltage with a boost converter...

Electricity: power supply or regulation systems – External or operator controlled – Using a three or more terminal semiconductive device as the...
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Method of detecting arc discharges in a plasma process

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Power supply unit for gas discharge processes

Electricity: power supply or regulation systems – In shunt with source or load – Using a three or more terminal semiconductive device
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Supplying RF power to a plasma process

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Profile ID: LFUS-PAI-P-2184069

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