Power supply unit for gas discharge processes

Details Power supply unit for gas discharge processes Power supply unit for gas discharge processes

2005-09-15

2008-08-05

Vo, Tuyet (Department: 2821)

Electricity: power supply or regulation systems

In shunt with source or load

Using a three or more terminal semiconductive device

C323S228000, C323S266000, C323S282000, C315S247000, C315S246000, C315S224000, C315S2090SC

Reexamination Certificate

active

07408329

ABSTRACT:
A method of generating an output DC voltage of a gas discharge process voltage supply unit, in which in a first voltage transformation stage a first DC voltage is transformed into a second DC voltage of a predetermined voltage range, and the output DC voltage is generated from the second DC voltage in a second voltage transformation stage. A switching element of at least one boost converter is switched with a controlled pulse-duty factor for generating the output DC voltage in the second voltage transformation stage. This method permits striking and maintenance of a plasma process.

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