Generating an output DC voltage with a boost converter...

Details Generating an output DC voltage with a boost converter... Generating an output DC voltage with a boost converter...

2011-03-01

2011-03-01

Vo, Tuyet Thi (Department: 2821)

Electricity: power supply or regulation systems

External or operator controlled

Using a three or more terminal semiconductive device as the...

C323S344000, C323S312000, C323S304000, C323S266000, C315S247000, C315S224000, C315S274000, C315S291000

Reexamination Certificate

active

07898238

ABSTRACT:
A method of generating an output DC voltage of a gas discharge process voltage supply unit, in which in a first voltage transformation stage a first DC voltage is transformed into a second DC voltage of a predetermined voltage range, and the output DC voltage is generated from the second DC voltage in a second voltage transformation stage. A switching element of at least one boost converter is switched with a controlled pulse-duty factor for generating the output DC voltage in the second voltage transformation stage. This method permits striking and maintenance of a plasma process.

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Japanese Office Action from corresponding Japanese Application No. 2006-504610 mailed Apr. 10, 2008, 2 pages along with an English Translation, 2 pages.

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