4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. Insulated gate formation

Markus Kuhn

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Depositing an oxide

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Metal-metal oxide etch stop/barrier for integrated circuit...

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
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Method and apparatus for forming metal-metal oxide etch...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Method for making a semiconductor device having a high-k...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Method for making a semiconductor device having a high-k...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2691444

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