4. Measuring and testing
  5. With fluid pressure
  6. Leakage

Mark Leonov

Inventor

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Centering/positioning apparatus for wafer and vacuum chuck

Metal working – Means to assemble or disassemble – Means comprising hand manipulatable tool
Patent

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Centering/positioning apparatus for wafer and vacuum chuck

Chucks or sockets – With fluid-pressure actuator – Socket type
Patent

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Cross-mask holder device

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Patent

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Holder mechanism for simultaneously tilting and rotating a wafer

Material or article handling – Article reorienting device – Article inverting means
Patent

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Method and apparatus for testing sputter targets

Measuring and testing – With fluid pressure – Leakage
Patent

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Profile ID: LFUS-PAI-P-171215

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