4. Radiant energy
  5. Photocells; circuits and apparatus
  6. Photocell controls its own optical systems

Marinus A. van den Brink

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Apparatus for and method of projecting a mask pattern on a subst

Photocopying – Projection printing and copying cameras – Step and repeat
Patent

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Apparatus for projecting a mask pattern on a substrate

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Patent

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Apparatus for projecting a mask pattern on a substrate

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Patent

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Imaging apparatus having a focus-error and/or tilt detection dev

Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Patent

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Lithographic apparatus for step-and-scan imaging of mask pattern

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent

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Profile ID: LFUS-PAI-P-259219

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