Apparatus for and method of projecting a mask pattern on a subst

Details Apparatus for and method of projecting a mask pattern on a subst Apparatus for and method of projecting a mask pattern on a subst

1991-01-24

1992-09-01

Hayes, Monroe H.

Photocopying

Projection printing and copying cameras

Step and repeat

G03B 2742

Patent

active

051443635

ABSTRACT:
A projection apparatus is described having a reference plate with a set of grating marks in X and Y directions for aligning with an exposure mask having similar marks, and having four detectors for each mark, and having a lens system for projecting only the relevant mark on the relevant detector. A method of projecting is also described in which the detection signals are simultaneously processed with other signals to result in a control signal to adjust image quality.

REFERENCES:
patent: 4853745 (1989-08-01), Kamiya et al.
patent: 4901109 (1990-02-01), Mitome et al.
patent: 4952970 (1990-08-01), Suzuki et al.
patent: 4958082 (1990-09-01), Makinouchi et al.

Affiliated with

Also associated with

Rating

Apparatus for and method of projecting a mask pattern on a subst does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus for and method of projecting a mask pattern on a subst, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for and method of projecting a mask pattern on a subst will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-771230