4. Radiation imagery chemistry: process, composition, or product th
  5. Imaging affecting physical property of radiation sensitive...
  6. Forming nonplanar surface

Marina V. Plat

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Anti-reflective interpoly dielectric

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
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Antireflective bi-layer hardmask including a densified...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Post imaging radiant energy exposure
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Application of the CVD bilayer ARC as a hard mask for...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Bi-layer trim etch process to form integrated circuit gate...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Bright field image reversal for contact hole patterning

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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