4. Radiation imagery chemistry: process, composition, or product th
  5. Imaging affecting physical property of radiation sensitive...
  6. Forming nonplanar surface

Manish Chandhok

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Active hardmask for lithographic patterning

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
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Adjustable illumination source

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Adjustment of distance between source plasma and mirrors to...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Compensation of reflective mask effects in lithography systems

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Compensation of reflective mask effects in lithography systems

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2372546

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