4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Maki Shimoda

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Method of forming a data-storing capacitive element made in...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Method of forming conductive layers in the trenches or...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
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Removal method of organic matter and system for the same

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Semiconductor integrated circuit device and a method of...

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Including dielectric isolation means
Reexamination Certificate

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Semiconductor integrated circuit device and method of...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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Profile ID: LFUS-PAI-P-125403

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