Single-crystal, oriented-crystal, and epitaxy growth processes;
Forming from vapor or gaseous state
With decomposition of a precursor
Inventor
active
Dielectric thin film device
Ferroelectric thin film, manufacturing method thereof and...
Method for manufacturing ferroelectric thin film, substrate cove
Method for producing ferroelectric film element, and ferroelectr
Thin ferroelectric film element having a multi-layered thin ferr
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