Method for producing ferroelectric film element, and ferroelectr

Details Method for producing ferroelectric film element, and ferroelectr Method for producing ferroelectric film element, and ferroelectr

1996-09-13

1998-12-22

Tsai, Jey

Fishing, trapping, and vermin destroying

437919, 437247, H01L 2170, H01L 2700

Patent

active

058518410

ABSTRACT:
A method for producing a ferroelectric element having a lower electrode layer, a ferroelectric film and an upper electrode layer provided in sequence on the substrate is disclosed. The method comprising the step of applying a metal-contained precursor solution to the surface of the lower electrode layer formed on the substrate, the step of drying the applied precursor solution to remove the solution alone by heating it, a first heat treatment step for heating the dried precursor to form a ferroelectric film, and a second heat treatment step for heating the formed film element in a gas-pressurized atmosphere of lower than 1 atmosphere after forming an upper electrode layer on the ferroelectric film.

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