Dielectric thin film device

Details Dielectric thin film device Dielectric thin film device

1994-11-02

1996-08-20

Ledynh, Bot L.

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

361313, 257295, 365149, 365145, H01G 406, G11C 1122, G11C 1124

Patent

active

055484751

ABSTRACT:
A dielectric thin film device comprising at least an electrode and a dielectric thin film, said dielectric thin film being a laminate of a plurality of layers whose compositions comprise the same kinds of atoms including volatile atom(s) but are different in the content of the volatile atom(s) in at least one layer from the other.

REFERENCES:
Nakamura, Takashi et al. "Preparation of C-Axis-Oriented . . . , " Japan Journal of Applied Phys., vol. 32, (1993) pp. 4086-4088.

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